goto kemstream.comKEMSTREAM advanced Direct Liquid Injection vaporizers and atomizers for CVD, ALD and Spray Pyrolysis processes
Kemstream creates high-performance vaporizers and atomizers. Vaporizers are direct liquid injection (DLI) vaporizers, direct liquid injection vaporization systems and evaporators designed for reliable, accurate and repeatable vaporization of liquid and dissolved solid compounds and precursors. These vapor delivery systems deliver pure vapor for every application including CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes and chambers. Atomizers are designed to deliver aerosol flow
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